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Chemical sputtering of hydrocarbon films by low-energy Ar ion and H atom impact
Hopf, C, Keudell, A. von, Jacob, WVolume:
42
Language:
english
Journal:
Nuclear Fusion
DOI:
10.1088/0029-5515/42/12/101
Date:
December, 2002
File:
PDF, 124 KB
english, 2002