Influence of heat and particle fluxes nonlocality on spatial distribution of plasma density in two-chamber inductively coupled plasma sources
Kudryavtsev, A. A., Serditov, K. Yu.Volume:
19
Year:
2012
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4731734
File:
PDF, 2.30 MB
english, 2012