c-axis inclined AlN film growth in planar system for shear...

Diamond and Related Materials 2008 / 7 Vol. 17; Iss. 7-10

c-axis inclined AlN film growth in planar system for shear wave devices

Fardeheb-Mammeri, A., Assouar, M.B., Elmazria, O., Gatel, C., Fundenberger, J-J., Benyoucef, B.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.02.016
Date:
July, 2008
File:
PDF, 564 KB
english, 2008
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