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Study of effect of deposition temperature of AlN films on SAW velocity using Brillouin spectroscopy
Assouar, M.B., Jiménez Riobóo, R.J., Elmazria, O., Vila, M.Volume:
16
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2006.12.012
Date:
April, 2007
File:
PDF, 425 KB
english, 2007