Remote-plasma chemical vapor deposition of conformal ZrB[sub 2] films at low temperature: A promising diffusion barrier for ultralarge scale integrated electronics
Sung, Junghwan, Goedde, Dean M., Girolami, Gregory S., Abelson, John R.Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1436296
File:
PDF, 689 KB
english, 2002