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Measurements of the electron energy distribution function in an Ar/CF[sub 4] inductively coupled plasma
Bowden, M. D., Tabata, R., Suanpoot, P., Uchino, K., Muraoka, K., Noguchi, M.Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1398775
File:
PDF, 299 KB
english, 2001