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Nanocrystalline silicon carbide thin films by fluidised/packed bed chemical vapor deposition using a halogen-free single source
Selvakumar, Jayaprakasam, Sathiyamoorthy, DakshinamoorthyVolume:
22
Year:
2012
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/c2jm15561c
File:
PDF, 494 KB
english, 2012