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Growth of ternary PbTiO[sub x] films in a combination of binary oxide atomic layer depositions
Watanabe, Takayuki, Hoffmann-Eifert, Susanne, Mi, Shaobo, Jia, Chunlin, Waser, Rainer, Hwang, Cheol SeongVolume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2422777
File:
PDF, 806 KB
english, 2007