Free molecular transport and deposition in long rectangular...

Free molecular transport and deposition in long rectangular trenches

Cale, T. S., Raupp, G. B., Gandy, T. H.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346328
File:
PDF, 1.12 MB
english, 1990
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