Surface Micromachined Microelectromechancial Ohmic Series Switch Using Thin-Film Piezoelectric Actuators
Polcawich, Ronald G., Pulskamp, Jeffrey S., Judy, Daniel, Ranade, Prashant, Trolier-McKinstry, Susan, Dubey, MadanVolume:
55
Language:
english
Journal:
IEEE Transactions on Microwave Theory and Techniques
DOI:
10.1109/TMTT.2007.910072
Date:
December, 2007
File:
PDF, 1.90 MB
english, 2007