Low energy focused ion beam milling of silicon and...

Nanotechnology 2011 / 03 Vol. 22; Iss. 10

Low energy focused ion beam milling of silicon and germanium nanostructures

Kolíbal, Miroslav, Matlocha, Tomáš, Vystavěl, Tomáš, Šikola, Tomáš
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Volume:
22
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/22/10/105304
Date:
March, 2011
File:
PDF, 1.05 MB
english, 2011
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