High Sensitivity, Miniature, Full 2-D Anemometer Based on MEMS Hot-Film Sensors
Liu, Hao-Bing, Lin, Nay, Pan, Shan-Shan, Miao, Jianmin, Norford, Leslie K.Volume:
13
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2012.2236014
Date:
May, 2013
File:
PDF, 1.11 MB
english, 2013