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Anodic oxidation during MEMS processing of silicon and polysilicon: native oxides can be thicker than you think
Kahn, H., Deeb, C., Chasiotis, I., Heuer, A.H.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.851802
Date:
October, 2005
File:
PDF, 2.58 MB
english, 2005