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Mechanical properties and structure of TiO2 films deposited on quartz and silicon substrates
Kulikovsky, V., Ctvrtlik, R., Vorlicek, V., Filip, J., Bohac, P., Jastrabik, L.Volume:
542
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.06.070
Date:
September, 2013
File:
PDF, 816 KB
english, 2013