Characterization of semiconductor devices and wafer...

Characterization of semiconductor devices and wafer materials via sub-nanosecond time-correlated single-photon counting

Buschmann, V., Hempel, H., Knigge, A., Kraft, C., Roczen, M., Weyers, M., Siebert, T., Koberling, F.
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Volume:
80
Language:
english
Journal:
Journal of Applied Spectroscopy
DOI:
10.1007/s10812-013-9786-4
Date:
July, 2013
File:
PDF, 1.02 MB
english, 2013
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