Tungsten-Based SOI Microhotplates for Smart Gas Sensors

Journal of Microelectromechanical Systems 2008 / 12 Vol. 17; Iss. 6

Tungsten-Based SOI Microhotplates for Smart Gas Sensors

Ali, S.Z., Udrea, F., Milne, W.I., Gardner, J.W.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2008.2007228
Date:
December, 2008
File:
PDF, 1.79 MB
english, 2008
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