SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, USA (Saturday 2 February 2013)] Optoelectronic Interconnects XIII - Low loss polycrystalline silicon waveguides and devices for multilayer on-chip optical interconnects
Kwong, David, Hosseini, Amir, Covey, John, Zhang, Yang, Xu, Xiaochuan, Chen, Ray T., Glebov, Alexei L., Chen, Ray T.Volume:
8630
Year:
2013
Language:
english
DOI:
10.1117/12.2005720
File:
PDF, 1.82 MB
english, 2013