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Mass Spectrometric Characterizations of Ions Generated in RF Magnetron Discharges during Sputtering of Silver in Ne, Ar, Kr an.d Xe Gases
Pokorný, Petr, Novotný, Michal, Musil, Jindřich, Fitl, Přemysl, Bulíř, Jiří, Lančok, JánVolume:
10
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201200145
Date:
July, 2013
File:
PDF, 704 KB
english, 2013