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High vacuum chemical vapour deposition of oxides:
Kuzminykh, Yury, Dabirian, Ali, Reinke, Michael, Hoffmann, PatrikVolume:
230
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.06.059
Date:
September, 2013
File:
PDF, 1013 KB
english, 2013