Density measurement of thin layers by electron energy loss spectroscopy (EELS)
Thomas, Jürgen, Ramm, Jürgen, Gemming, ThomasVolume:
50
Language:
english
Journal:
Micron
DOI:
10.1016/j.micron.2013.05.001
Date:
July, 2013
File:
PDF, 1.35 MB
english, 2013