Deposition of stress-free diamond films on Si by diamond/β-SiC nanocomposite intermediate layers
Srikanth, Vadali V.S.S., Staedler, Thorsten, Jiang, XinVolume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2009.07.007
Date:
October, 2009
File:
PDF, 565 KB
english, 2009