SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Uniformity-improving dummy structures for deep reactive ion etching (DRIE) processes
Jensen, Soren, Jensen, Jonas M., Quaade, Ulrich J., Hansen, Ole, Maher, Mary-Ann, Stewart, Harold D.Volume:
5715
Year:
2005
Language:
english
DOI:
10.1117/12.588552
File:
PDF, 576 KB
english, 2005