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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 2 February 2013)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII - Time and space resolved investigations of confined fs ablation of Ta 2 O 5 /Pt thin film systems
Rapp, S., Rosenberger, J., Domke, M., Heise, G., Schmidt, M., Huber, H. P., Xu, Xianfan, Hennig, Guido, Nakata, Yoshiki, Roth, Stephan W.Volume:
8607
Year:
2013
Language:
english
DOI:
10.1117/12.2002409
File:
PDF, 1.37 MB
english, 2013