SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - High-resolution measurement of thin metallic films and multilayers by femtosecond laser pulses
Vollmann, Jacqueline, Profunser, Dieter M., Dual, Jurg, Gorecki, Christophe, Jueptner, Werner P. O., Kujawinska, MalgorzataVolume:
4400
Year:
2001
Language:
english
DOI:
10.1117/12.445590
File:
PDF, 249 KB
english, 2001