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Effect of Ion Implantation and Annealing on the Dielectric Properties of Silicon
P. Żukowski, J. Partyka, P. WęgierekVolume:
159
Year:
1997
Language:
english
Pages:
7
DOI:
10.1002/1521-396x(199702)159:23.0.co;2-k
File:
PDF, 231 KB
english, 1997