Low refractive index SiOF thin films prepared by reactive...

Thin Solid Films 2013 / 09 Vol. 542

Low refractive index SiOF thin films prepared by reactive magnetron sputtering

Garcia-Garcia, F.J., Gil-Rostra, J., Terriza, A., González, J.C., Cotrino, J., Frutos, F., Ferrer, F.J., González-Elipe, A.R., Yubero, F.
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Volume:
542
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.07.009
Date:
September, 2013
File:
PDF, 597 KB
english, 2013
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