Low-Stress Silicon Nitride Platform for Mid-Infrared...

Advanced Optical Materials 2013 / 10 Vol. 1; Iss. 10

Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics

Lin, Pao Tai, Singh, Vivek, Lin, Hao-Yu Greg, Tiwald, Tom, Kimerling, Lionel C., Agarwal, Anuradha Murthy
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Volume:
1
Language:
english
Journal:
Advanced Optical Materials
DOI:
10.1002/adom.201300205
Date:
October, 2013
File:
PDF, 1.31 MB
english, 2013
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