Study of Niobium Nitride Films Produced by DC Reactive Magnetron Sputtering
I. Hotovy, D. Buc, J. Brcka, R. SrnanekVolume:
161
Year:
1997
Language:
english
Pages:
8
DOI:
10.1002/1521-396x(199705)161:13.0.co;2-o
File:
PDF, 280 KB
english, 1997