![](/img/cover-not-exists.png)
Application of nanoindentation technique for investigation of elasto-plastic properties of the selected thin film materials
Wymysłowski, Artur, Dowhań, ŁukaszVolume:
53
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2012.10.009
Date:
March, 2013
File:
PDF, 2.49 MB
english, 2013