Noncontact Carrier Lifetime Depth Profiling of Ion-Implanted Si Using Photothermal Radiometry
A. Othonos, A. Salnick, A. Mandelis, C. ChristofidesVolume:
161
Year:
1997
Language:
english
Pages:
1
DOI:
10.1002/1521-396x(199706)161:23.0.co;2-h
File:
PDF, 140 KB
english, 1997