SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Predictive modeling of advanced illumination pupils used as imaging enhancement for low-k1 applications
Heil, Tilmann, Graupner, Paul, Garreis, Reiner, Egger, Rafael, Brotsack, Markus, Finders, Jo, Hansen, Steve, Smith, Bruce W.Volume:
5377
Year:
2004
Language:
english
DOI:
10.1117/12.537199
File:
PDF, 386 KB
english, 2004