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Ferromagnetic enhanced inductive plasma sources

Ferromagnetic enhanced inductive plasma sources

Godyak, Valery
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Volume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/28/283001
Date:
July, 2013
File:
PDF, 4.95 MB
english, 2013
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