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SPIE Proceedings [SPIE 1980 International Lens Design Conference - Oakland, United States (Saturday 31 May 1980)] 1980 International Lens Design Conference - New Lenses For Microlithography
Glatzel, ErhardVolume:
237
Year:
1980
Language:
english
DOI:
10.1117/12.959098
File:
PDF, 406 KB
english, 1980