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Kinetics of disilane molecule decomposition on the growth surface of silicon in vacuum gas-phase epitaxy reactors
Orlov, L. K., Smyslova, T. N.Volume:
57
Language:
english
Journal:
Technical Physics
DOI:
10.1134/S1063784212110187
Date:
November, 2012
File:
PDF, 260 KB
english, 2012