A Novel Analytical Approach for Multi-Layer Diaphragm-Based...

Chinese Physics Letters 2006 / 05 Vol. 23; Iss. 5

A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors

Ming, Li, Ming, Wang, Hua, Rong, Hong-Pu, Li
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Volume:
23
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/23/5/041
Date:
May, 2006
File:
PDF, 448 KB
english, 2006
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