The fabrication, characterization and testing of a MEMS...

The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor

Ismail, A K, Burdess, J S, Harris, A J, Suarez, G, Keegan, N, Spoors, J A, Chang, S C, McNeil, C J, Hedley, J
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/2/025021
Date:
February, 2008
File:
PDF, 1.91 MB
english, 2008
Conversion to is in progress
Conversion to is failed