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[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Piezoelectrically transduced single-crystal-silicon plate resonators
Jaakkola, Antti, Rosenberg, Piia, Asmala, Samuli, Nurmela, Arto, Pensala, Tuomas, Riekkinen, Tommi, Dekker, James, Mattila, Tomi, Alastalo, Ari, Holmgren, Olli, Kokkonen, KimmoYear:
2008
Language:
english
DOI:
10.1109/ULTSYM.2008.0171
File:
PDF, 1.22 MB
english, 2008