Design, analysis and fabrication of a novel six-axis...

IET Science Measurement & Technology 2013 / 01 Vol. 7; Iss. 1

Design, analysis and fabrication of a novel six-axis micropositioning stage

Hwu, Farn-Shiun, Lin, Kao-Hui, Hu, Ya-Hui
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Volume:
7
Language:
english
Journal:
IET Science, Measurement & Technology
DOI:
10.1049/iet-smt.2012.0061
Date:
January, 2013
File:
PDF, 746 KB
english, 2013
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