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Direct Observation of Dielectric Breakdown Spot in Thermal Oxides on 4H-SiC(0001) Using Conductive Atomic Force Microscopy
Kozono, Kohei, Hosoi, Takuji, Kagei, Yusuke, Kirino, Takashi, Mitani, Shuhei, Nakano, Yuki, Nakamura, Takashi, Shimura, Takayoshi, Watanabe, HeijiVolume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.821
Date:
April, 2010
File:
PDF, 406 KB
english, 2010