Effect of sputtering gas on structural, optical and...

Surface and Coatings Technology 2013 / 10 Vol. 232

Effect of sputtering gas on structural, optical and hydrophobic properties of DC-sputtered hafnium oxide thin films

Dave, V., Dubey, P., Gupta, H.O., Chandra, R.
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Volume:
232
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.05.046
Date:
October, 2013
File:
PDF, 1.55 MB
english, 2013
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