Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor
Lazović, Saša, Puač, Nevena, Spasić, Kosta, Malović, Gordana, Cvelbar, Uroš, Mozetič, Miran, Radetić, Maja, Petrović, Zoran LjVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/7/075201
Date:
February, 2013
File:
PDF, 228 KB
english, 2013