Motion Control of Piezoelectric Positioning Stages:...

IEEE/ASME Transactions on Mechatronics 2013 / 10 Vol. 18; Iss. 5

Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation

Gu, Guo-Ying, Zhu, Li-Min, Su, Chun-Yi, Ding, Han
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Volume:
18
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2012.2203315
Date:
October, 2013
File:
PDF, 1.54 MB
english, 2013
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