Ti concentration effect on adhesive energy at Cu/TiW...

Ti concentration effect on adhesive energy at Cu/TiW interface

Furuya, Akira, Ohshita, Yoshio
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Volume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.368805
File:
PDF, 510 KB
english, 1998
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