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Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry
Gaspar, JoãoVolume:
50
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.3572186
Date:
October, 2011
File:
PDF, 1.10 MB
english, 2011