The significance of the piezoelectric coefficient d 31,eff determined from cantilever structures
Dekkers, M, Boschker, H, van Zalk, M, Nguyen, M, Nazeer, H, Houwman, E, Rijnders, GVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025008
Date:
February, 2013
File:
PDF, 851 KB
english, 2013