Capacitive micromachined ultrasonic transducer design for...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2005 / 02 Vol. 52; Iss. 2

Capacitive micromachined ultrasonic transducer design for high power transmission

Bayram, B., Oralkan, O., Ergun, A.S., Haeggstrom, E., Yaralioglu, G.G., Khuri-Yakub, B.T.
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Volume:
52
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2005.1406558
Date:
February, 2005
File:
PDF, 1.84 MB
english, 2005
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