![](/img/cover-not-exists.png)
DLC Coating by HiPIMS: The Influence of Substrate Bias Voltage
Nakao, Setsuo, Yukimura, Ken, Nakano, Shizuka, Ogiso, HisatoVolume:
41
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2013.2256800
Date:
August, 2013
File:
PDF, 1.29 MB
english, 2013