Mechanical Behavior and Anisotropy of Spin-Coated SU-8 Thin...

Journal of Microelectromechanical Systems 2014 / 02 Vol. 23; Iss. 1

Mechanical Behavior and Anisotropy of Spin-Coated SU-8 Thin Films for MEMS

Robin, C. J., Vishnoi, Aakansha, Jonnalagadda, Krishna N.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2264341
Date:
February, 2014
File:
PDF, 1.06 MB
english, 2014
Conversion to is in progress
Conversion to is failed