Silicon-Embedding Approaches to 3-D Toroidal Inductor Fabrication
Yu, Xuehong, Kim, Minsoo, Herrault, Florian, Ji, Chang-Hyeon, Kim, Jungkwung, Allen, Mark G.Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2233718
Date:
June, 2013
File:
PDF, 1.43 MB
english, 2013