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Geometric superresolution and field-of-view extension achieved using digital mirror devices
Zlotnik, Alex, Kapellner, Yuval, Afik, Zvika, Layani, Itshak, Zalevsky, ZeevVolume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.3.033001
Date:
July, 2013
File:
PDF, 2.47 MB
english, 2013